四探針電阻儀

ResMap Four Point Probe

型號：美國CDE ResMap 178

技術參數(shù)：

﹡測量尺寸：2~8寸晶圓

﹡測量速度：大于49點/分鐘

﹡測量范圍：1mΩ sq^-1 ~5MΩ sq^-1

﹡測量重復性：≤±0.02%

﹡精確度：＜0.1%

Model: CDE ResMap 178

Technical Parameters:

﹡Wafer size: 2~8 inch wafer

﹡Measurement speed: 49 points/min or better

﹡Measurement range: 1mΩ sq^-1 ~5MΩ sq^-1

﹡Repeatability: ≤±0.02%

﹡Accuracy: ＜0.1%